Table 2 Structure and GMR ratio of GMR sensors
GMR senser type | Structure | Flexible substrate | GMR ratio | Ref. |
|---|---|---|---|---|
Multilayers | Co/Cu | Mylar foil | 23% | |
Co/Cu | PET | 57.8% | ||
NiFe/Cu | PDMS | 57% | ||
Spin valve | Ta/Ru/IrMn/CoFe/Ru/ CoFe/Cu/CoFe/NiFe/Ru | PI | 2.46% | |
Ta/IrMn/FeCo/Cu/FeCo/ FeNi/FeCo/Cu/FeCo/IrMn/Pt | PI/PDMS | 8% | ||
Ta/Pt/Cu/NiFe/FeMn/Pt | PI | 5.51% | ||
Ta/IrMn/FeCo/Cu/FeCo/ FeGa/Ta | PET | 5.9% |
