Fig. 4: HRTEM and EDX.
From: Ultrafast flash lamp annealing of magnetic tunnel junctions
a–e HRTEM images of as-made, CTA, and FLA (n = 33, 40 and 42) MTJs. The layers from the Ta layer underneath the bottom CoFeB layer to the topmost Ru layer are shown in the large squares, and the CoFeB/MgO/CoFeB layers are enlarged in the insets. f–j EDX line profiles of the CTA, as-made, and FLA (n = 33, 40 and 42) MTJs. The results for O, Mg, Fe, Co, Ru, and Ta are summarized in the same panel, while the result for B is shown in a separate panel on the right side in each figure. The horizontal dashed lines indicate the peak positions of Fe in the top and bottom CoFeB layers.
