Fig. 6: Simulation results of the integrated dispersion Dint of the AlN microresonator.
From: Simplified aluminum nitride processing for low-loss integrated photonics and nonlinear optics
The pump wavelength is 1546 nm. The Si3N4 layer thickness is changed between 0 nm and 100 nm. No significant change of the dispersion profile is observed as a result of the thin Si3N4 layer.
