Fig. 7: Strategies for improving pressure sensitivity in capacitive pressure sensors.

Sensitivity enhancement in pressure sensors can be achieved through multiple approaches. Structural engineering strategies include the introduction of microstructures, such as micro-pyramids37,38, microcones45,46,74, spacers or air gap engineering51 foams43,51,52,54, gradient microstructures59, multilayer designs (such as double layers)42, and bioinspired structures62,63, to increase deformability and enhance pressure sensitivity, among other structural arrangements.