Low-dielectric-constant (k < 2) materials are needed to reduce crosstalk, delay and power consumption in microelectronic circuits. Here, the authors report the growth of low-k 2D fluoride-rich polymer thin films, showing good mechanical properties and their application for the realization of 2D MoS2 transistors with improved performance.
- Qiyi Fang
- Kongyang Yi
- Jun Lou
