We describe a novel method for liquid crystal (LC) alignment using nano-patterns of electrically conductive indium–tin oxide (ITO) layers with high resolution (ca<20 nm) and high aspect ratio (ca 8), fabricated based on the secondary sputtering phenomenon. The ITO pattern developed in this manner can function as an electrode and alignment layer at the same time, which facilitates successful fabrication of bifunctional conductive alignment layer for LC devices.
- Hyeon Su Jeong
- Hwan-Jin Jeon
- Hee-Tae Jung