Radical copolymerization of alkyl 2-norbornene-2-carboxylates 1a–c with alkyl (meth)acrylates to afford copolymers bearing norbornane framework in the main chain is described. γ-Butyrolactone- and hydroxy group-containing norbornene-based monomers 1b and 1c were newly synthesized and their radical copolymerization behavior with n-butyl acrylate was examined. Methyl 2-norbornene-2-carboxylate 1a and the new monomers 1b and 1c were employed as a comonomer for radical terpolymerization with lactone- and adamantane-containing (meth)acrylates to afford copolymers, which could be utilized as new chemically amplified 193-nm photoresist materials.
- Eiji Ihara
- Satoru Ishii
- Mitsufumi Nodono