Fig. 1: Mechanism of microchannel-type sensor.
From: Ultrasensitive liquid sensor based on an embedded microchannel bulk acoustic wave resonator
a Schematic of an embedded microchannel-type sensor, b schematic of the deformation of a piezoelectric film when liquid flows in a microchannel, and c schematic of wurtzite structure hexagonal supercell variation of AlN when liquid flows in a microchannel
