Fig. 1: Schematic of SOI wafer, cavity-SOI, and the proposed SSC wafer with device structures. | Microsystems & Nanoengineering

Fig. 1: Schematic of SOI wafer, cavity-SOI, and the proposed SSC wafer with device structures.

From: A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration

Fig. 1

The microacoustic device platform evolution structures: a SOI wafer, b cavity-SOI wafer, and c proposed SSC wafer with the zoomed-in image of the sealed silicon cavity. d The microscope image of the fabricated sealed silicon cavities. e The schematic diagram of the structure of the proposed S-BAR

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