Fig. 4: Micrographs and atomic force microscope (AFM) images of sealed silicon cavity.
From: A wafer-level sealed silicon cavity microacoustic platform for radio frequency integration
a, b Three-dimensional (3-D) laser micrographs of an oval-shaped sealed silicon cavity before and after surface smoothing. c, d AFM images with root mean square (RMS) of film surface inside the cavity region before and after surface smoothing. e, f AFM images with RMS of surface outside of the cavity region before and after surface smoothing
