Fig. 1
From: Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process
Schematic illustration of the Si3N4 nanopore array fabrication process
Fig. 1 | Microsystems & Nanoengineering
From: Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process
Schematic illustration of the Si3N4 nanopore array fabrication process
