Table 1 The CDs of nanopores and SpacerX of Wafer 1
From: Wafer-scale fabrication of solid-state nanopore array with a novel SpacerX process
No. | \({\boldsymbol{C}}{{\boldsymbol{D}}}_{{\boldsymbol{spacer}}}\) (nm) | \({\boldsymbol{C}}{{\boldsymbol{D}}}_{{\boldsymbol{pore}}}\) (nm) | R | β |
|---|---|---|---|---|
Wafer 1 | 50 (\(C{D}_{{USP}}\)) | 54.6 ± 4.7 (\(C{D}_{{pore\_L}}\)) | 1.09 ± 0.09 (\({R}_{{USP}}\)) | 1.27 ± 0.17 |
50 (\(C{D}_{{BSP}}\)) | 43.3 ± 4.0 (\(C{D}_{{pore\_W}}\)) | 0.87 ± 0.08 (\({R}_{{BSP}}\)) |
