Fig. 1: AFM images of the micro-axicon array.

a 3D; b 2D; c Geometric diagram of a micro-axicon. d–h The AFM data at the positions of the five dashed lines in (b)

a 3D; b 2D; c Geometric diagram of a micro-axicon. d–h The AFM data at the positions of the five dashed lines in (b)