Fig. 3: Schematic diagram of the experimental system and comparison with optical field characterization results. | Microsystems & Nanoengineering

Fig. 3: Schematic diagram of the experimental system and comparison with optical field characterization results.

From: Fast and accurate measurement of high aspect ratio MEMS trench array with optical lattice illumination

Fig. 3

a 3D schematic of the experimental system. b 2D schematic of the experimental system. c Photograph of the test sample. d Photograph of the micro-axicon array. e AFM characterization of the micro-axicon array. f Experimental and simulated lattice light field patterns generated by the micro-axicon array. g Measurement procedure for trench morphology parameters

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