Fig. 7: Depth measurement results for 9 samples. | Microsystems & Nanoengineering

Fig. 7: Depth measurement results for 9 samples.

From: Fast and accurate measurement of high aspect ratio MEMS trench array with optical lattice illumination

Fig. 7

a Y-coordinate evolution of tracking points in 1# trench array (1005–1014). b Frame-wise Y-coordinate variation (Frames 1–600; initial/middle/final frames marked). c Spatial distribution of tracking point coordinates (X, Y). d Frequency histogram of Y-coordinate values. e Comparison between the averaged triplicate measurement results and SEM measurements for the nine samples (top: μm; bottom: pixels), with error annotations. f The line-scatter plot of triplicate depth measurements for the nine samples

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