Table 1 The depth and width values (SEM measurement results) of nine samples
Sample ID | Depth (μm) | Width (μm) | Aspect ratio | SEM uncertainty (nm) |
|---|---|---|---|---|
1# | 111.00 | 1.91 | 58.12 | 116.48 |
2# | 144.00 | 5.08 | 28.35 | 67.88 |
3# | 175.00 | 10.10 | 17.33 | 67.88 |
4# | 122.00 | 2.58 | 47.29 | 67.88 |
5# | 41.90 | 1.85 | 22.65 | 40.59 |
6# | 43.00 | 2.06 | 20.87 | 40.59 |
7# | 45.30 | 2.44 | 18.57 | 22.61 |
8# | 41.20 | 1.67 | 24.67 | 22.61 |
9# | 42.50 | 1.87 | 22.73 | 22.61 |
