Table 2 Width of HAR trench array measured by SEM and our method

From: Fast and accurate measurement of high aspect ratio MEMS trench array with optical lattice illumination

Sample ID

Trench width using SEM (pixels)

Three measurement results of trench width (pixels)

Average of the results (pixels)

Deviation (pixels)

Relative deviation (%)

1#

13.04

13.02, 13.22, 13.10

13.11

0.07

0.54

2#

34.68

36.13, 35.77, 35.63

35.84

1.16

3.34

3#

68.94

66.27, 70.15, 69.60

68.67

0.27

0.39

4#

17.61

15.50, 16.50, 16.37

16.12

1.49

8.46

5#

12.63

11.70, 11.87, 11.33

11.63

1.00

7.92

6#

14.06

13.58, 13.30, 13.43

13.44

0.62

4.41

7#

16.66

17.22, 16.90, 17.10

17.07

0.41

2.46

8#

11.40

10.90, 11.07, 10.87

10.95

0.45

3.95

9#

12.76

11.27, 12.27, 12.33

11.96

0.8

6.27

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