Table 1 Comparison of the frequency range (kHz) with specified SPL and THD between this work and other piezoelectric loudspeakers

From: SPL and THD improvement of a cantilever-diaphragm piezoelectric MEMS loudspeaker with Double-S actuators

Ref.

SPL ≥ 80 dB

SPL ≥ 100 dB

THD ≤ 3%

THD ≤ 1%

Diaphragm area (mm2)

Excitation voltage

This work

0.45-20

7.1-20

0.4-2.8 & 3.55-20

3.75-20

28.3

3 Vpp (Config. A + B)

Ref. 18

5-18

5.6-8.3 & 11.2-14.5

7.7-18

8.4-12.5

7.14

2 Vpp+9 Vdc

Ref. 19

0.02-20

0.1-18

0.02-3

0.02-2

16

8 Vrms

Ref. 20

0.02-20

4.6-15

0.02-2.4

0.06-2.2

16

2 Vpp

Ref. 22

3.3-14.1

5.2-6.4

1-8.9 & 11-20

11-20

2.25

1 Vpp+2 Vdc

Ref. 24

0.11-20

2.8-3.3

Not provided

Not provided

22.5

2 Vpp

Ref. 28

0.1-20

3.8-18

0.1-3.3

0.1-1.2

14.44

5 Vpp+12 Vdc