Fig. 10: Single-layer MEMS mirrors based on piezoelectric AlScN. | Microsystems & Nanoengineering

Fig. 10: Single-layer MEMS mirrors based on piezoelectric AlScN.

From: Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping

Fig. 10

a Schematic and motion scan images of the proposed micromirror design113. Schematic, photograph, and SEM images of MEMS mirrors: b with a gimbal-less structure and c with a gimbaled structure122. d Photographs of fabricated micromirrors, large-angle scanning operation, simulation results of operation modes, and Lissajous figure generated by the biaxial micromirror121

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