Fig. 12: Performance comparison of reported MEMS micromirrors using piezoelectric AlN and AlScN. | Microsystems & Nanoengineering

Fig. 12: Performance comparison of reported MEMS micromirrors using piezoelectric AlN and AlScN.

From: Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping

Fig. 12: Performance comparison of reported MEMS micromirrors using piezoelectric AlN and AlScN.The alternative text for this image may have been generated using AI.

a Resonant-mode mirrors plotted by area of mirror plate and optical scan angle × frequency. b Quasi-static mirrors plotted by area of mirror plate and optical scan angle. Dashed lines represent indicative figure of merit (FoM) contours

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