Fig. 13: Application domains of piezoelectric MEMS mirrors with demonstrated or potential implementation of AlScN-based devices. | Microsystems & Nanoengineering

Fig. 13: Application domains of piezoelectric MEMS mirrors with demonstrated or potential implementation of AlScN-based devices.

From: Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping

Fig. 13

a Dual-axis laser projection for automotive smart headlights109. b Compact image projection in augmented reality smart glasses124. c High-power laser material processing with circular scanning110. d Cold-atom control in quantum optics using quasi-static beam steering125. e Wide-angle LiDAR beam steering for 3D sensing126. f High-speed and stable laser tracking in dynamic environments127

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