Fig. 5: AlN-Based MEMS Micromirrors with 1-DOF.

a Schematic of the AlN-based micromirror design, accompanied by interferometric images showing the mirror surface at rest, during piston motion, and under tilt actuation as captured using a profiler¹⁰⁰. b Structural diagram of the proposed AlN micromirror, featuring 250 µm-long L-shaped suspension beams linking the mirror plate to the actuators. Resonant mode shapes were experimentally validated using laser-Doppler vibrometry (LDV)¹⁰². c Layout of the AlN-based micromirror structure, where 5 µm-thick L-shaped beams link the actuators to the mirror plate. Each actuator incorporates dual sensor elements positioned at its outer ends. LDV scans illustrate dynamic response under both torsional and piston-mode actuation¹⁰³. d Schematic of the AlN thin-film-based piezoelectric MEMS micromirror design proposed in the study¹⁰⁵. e Actuator-side photograph of the fabricated MEMS micromirror, showing piezoelectric¹⁰⁶