Table 1 Comparison between KNN, LiNbO₃, PZT, PNZT, AlN, and AlScN piezoelectric materials

Performance	KNN	LiNbO₃	PZT	PNZT	AlN	^*AlScN
Material category	Ferroelectric	Ferroelectric	Ferroelectric	Ferroelectric	Non-ferroelectric	Non-ferroelectric / Ferroelectric
Mechanical behavior	Hysteresis	Linear	Hysteresis	Hysteresis	Linear	Linear
CMOS compatibility	No	No	No	No	Yes	Yes
Directionality	Unidirectional	Bidirectional	Unidirectional	Unidirectional	Bidirectional	Bidirectional
Lead content	No	No	Yes	Yes	No	No
Piezoelectric coefficient, \|e_31,f \| [C/m²]	11–13	≈6.8	12.2	15.3	≈1.1	≈3.16

^*Al_1-xSc_xN exhibits a clear composition dependence: films with Sc content ≤ 0.25 act as non-ferroelectric, linear piezoelectrics that allow bidirectional actuation. For x ≥ 0.27 the films are switchable ferroelectrics, yet their coercive field is well above the electric fields normally applied in MEMS mirrors, so they still operate linearly and bidirectionally with negligible hysteresis. The piezoelectric coefficient quoted in the table was measured for a film with x ≈ 0.41 and therefore represents the ferroelectric state

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