Table 4 Comparative summary of MEMS micromirrors based on piezoelectric AlScN, including three-level and single-layer constructions
Year | Author(s) | Piezoelectric material | Mirror plate area | Chip size (mm2) | 1DOF | Scanning mode | Resonant frequency (Hz) | 2FoM | 3Drive voltage | 4Optical scan angle |
|---|---|---|---|---|---|---|---|---|---|---|
2020 | Gu-Stoppel et al.60. | Al0.76Sc0.24N | D = 0.8 mm | 1.1 × 1.3 | TT | Quasi-static | (X) 700 (Y) 790 | 28 | 150 VDC | 56° |
2021 | Gu-Stoppel et al.114. | AlScN | D = 10 mm | 11 × 11 | TT | Quasi-static | 98 | 817 | 150 VDC | 510.4° |
2023 | Hwang et al.115. | AlScN | D = 2 mm | 8 × 8 | TT | Quasi-static Resonant | (X) 621.3 (Y) 632.5 | 33 32 | ±20 VDC 0.25 Vpeak | 10.4° (X) 11° / (Y) 16° |
2024 | Hwang et al.116. | AlScN | D = 2 mm | 11 × 11 | TT | Quasi-static | - | 63 | ±70 VDC | 20° |
2024 | Yang et al.117. | AlScN | D = 10 mm | 25 × 25 | TTP | Quasi-static Resonant | 1011 | 47 794 | ±90 VDC 90 VAC | 0.6° (X/Y) 10° |
2024 | Zhang et al.118. | Al0.904Sc0.096N | 5 × 5 mm2 | 5 × 5 | TTP | Quasi-static | 106 | 220 | ±50 VDC | 8.8° |
2024 | Yang et al.119. | AlScN | D = 10 mm | 25 × 25 | TTP | Quasi-static | 735 | 25 | 68 VDC | 0.316° (5.52 mrad) |
2025 | Xue et al.120. | Al0.8Sc0.2N | D = 10 mm | 26 × 22 | TTP | Quasi-static | 1230 | 40 | ±110 VDC | 0.504° (8.4 mrad) |
2022 | Stoeckel et al.113. | Al0.68Sc0.32N | D = 1 mm | 4 × 6 | T | Quasi-static | 2121 | 44 | 220 VDC | 55.6° |
2022 | Liu et al.122. | AlScN | D = 1.5 mm | 5.4 × 4.3 | TT | Resonant | (X) 3187.1 (Y) 8187.5 | 127 | 30 VAC | (X) 22.6° / (Y) 4.1° |
2024 | Huang et al.121. | AlScN | D = 5 mm | 10 × 10 | TT | Resonant | (X) 816 (Y) 928 | 445 | 45 Vpeak | (X) 21.0° / (Y) 24.4° |
