Fig. 6: Images of fabricated metalenses via the FIB technique.
From: Review for optical metalens based on metasurfaces: fabrication and applications
a SEM image of the fabricated metafiber, shows the entire fiber cross-section. b SEM image shows the entire metasurface with different sizes Au nanoholes (upper). SEM image shows two units (lower). c Light-light interaction on the metasurface exhibiting coherence. Inset: SEM image of the entire fabricated sample (right), black scale bar: 100 μm. Inset: SEM image shows the asymmetrical Au split ring apertures array (left), gray scale bar: 1 μm. SEM images of two fabricated PCF metalens with Au nanoholes with different orientations. NA of (d) and (e) is 0.37 and 0.23, respectively. f SEM image of the cross-section of the fabricated metafiber (left). SEM image shows the entire metasurface with Au nanoholes with different orientations. g SEM image of the cross-section of the fabricated metafiber. h SEM image shows the concentric ring Au nanogrooves (metagrating). SEM images show the fabricated single metalens (i) and the fabricated array of metalenses (j) is integrated with a μ-LED respectively, with different sizes GaN nanoholes. a, b Reprinted with permission from ref. 144. Copyright 2017 Springer Nature. c Reprinted with permission from ref. 145. Copyright 2018 Springer Nature. d, e Reprinted with permission from ref. 146. Copyright 2019 De Gruyter. f Reprinted with permission from ref. 147. Copyright 2023 De Gruyter. g, h Reprinted with permission from ref. 148. Copyright 2024 American Chemical Society. i, j Reprinted with permission from ref. 149. Copyright 2024 Elsevier
