Fig. 4: Evaluation of FEA accuracy. | Microsystems & Nanoengineering

Fig. 4: Evaluation of FEA accuracy.

From: Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators

Fig. 4

a The configuration of the ETA in the 3D model without metastructures and its corresponding displacement versus voltage profile, derived from FEA simulations. b–d Configurations of ETA integrated with different metastructures and their input-output behaviors from 3D FEA simulation: b nanoscale DS, c microscale DS, and d microscale SS. The corresponding displacement versus voltage profile is based on FEA. The dashed black line is to help with the visualization of the beams, as the original beams are too narrow to be observed. e The configuration of the selected microscale SS metastructure, designed with fabrication constraints imposed by the MUMPs process, along with its displacement versus voltage profile derived from FEA simulations. f The configuration of the selected microscale SS metastructure, adding parallel beams to increase total output actuation force for future applications, together with the corresponding displacement versus voltage profile, derived from FEA simulations

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