Fig. 5: Calibration of the fabricated MEMS device. | Microsystems & Nanoengineering

Fig. 5: Calibration of the fabricated MEMS device.

From: Machine learning-driven metastructure design for sensor-free linearization of MEMS electrothermal actuators

Fig. 5

a SEM image of the overall layout, showing the thermal actuator, the integrated metastructure, and the electrodes. b Zoomed in view of the specimen loading area at 0 V, boxed by the red region in a. The inset is the isotropic view. The gap is milled by FIB. c SEM images showing the evolution in gap distance change at varied applied voltage from 0 V to 7 V. d The displacement versus voltage profiles for three cases: the FEA of the ETA without a metastructure (black), the FEA of ETA with finalized-metastructure design (red), and the fabricated device (blue). Errors of ±3 pixels were applied when measuring gap distance in the fabricated devices and included in the plot, but they are too small to be observed at this scale

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