Fig. 1

ITON piezoresistive effect test. a Schematic diagram of the equal strain beam test principle, b GF curves of ITO with different line widths, c GF curves of ITON with 30 µm line widths, d–h Frequency response curves of ITON resistors at 25 °C, 200 °C, 500 °C, 800 °C, and 1000 °C, respectively, i Response time curve of ITON resistor