Table 1 Comparisons among recent studies on resonant pressure sensors and this work
From: Dispersive coupling and dual-mode sensing of a micromechanical resonator
Li5 | Xiang6 | Yao16 | Lu17 | Xia19 | This work | |
|---|---|---|---|---|---|---|
Compensation Method | Dual-resonator | Integrated temperature sensor | Dual-resonator | Dual-resonator | Amplitude | Dual-mode |
Pressure Range (kPa) | 0–265 | 200–2000 | 10–120 | 10–200 | 10–100 | 5–100 |
Repeatability (%FS) | — | — | — | 0.01 | 0.009 | 0.0042 |
Pressure Hysteresis (%FS) | — | — | 0.012 | 0.01 | 0.007 | 0.0068 |
Nonlinearity/ Fitting Accuracy (%FS) | ±0.017 | ±0.02 | ±0.02 | ±0.009 | ±0.006 | ±0.009 |
Overall Accuracy (%FS) | — | — | ±0.02 | ±0.02 | ±0.012 |
