Fig. 5 | Microsystems & Nanoengineering

Fig. 5

From: Sound-focusing package for MEMS vector hydrophone

Fig. 5

Comparative Simulation of nylon sound-focusing cap (NSC) and steel mesh sound-transmitting cap (SMC). a Structural schematic of SMC; b The position of bionic cilia in NSC and SMC; c Directivity comparison of SMC; d Directivity comparison of NSC; e 2-D plan view of SMC; f Particle acceleration comparison; g The simulated sensitivity diagram obtained by placing the sensitive element inside the NSC

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