Fig. 1: Schematic illustration of typical MEMS electrostatic actuators.
From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review
a An actuator driven by the electrostatic force between two parallel plates. b A comb-drive actuator with interdigitated teeth. The electrostatic force of the comb drive is not affected by the distance between the two electrodes. Thus, the comb drive is conveniently controllable
