Fig. 1: Schematic illustration of typical MEMS electrostatic actuators. | Microsystems & Nanoengineering

Fig. 1: Schematic illustration of typical MEMS electrostatic actuators.

From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review

Fig. 1: Schematic illustration of typical MEMS electrostatic actuators.The alternative text for this image may have been generated using AI.

a An actuator driven by the electrostatic force between two parallel plates. b A comb-drive actuator with interdigitated teeth. The electrostatic force of the comb drive is not affected by the distance between the two electrodes. Thus, the comb drive is conveniently controllable

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