Fig. 14: Potential applications of MEMS electric field sensors.

a Packaged setup containing MEMS electric field sensor for diagnosis of HVDC system¹⁵³. The white package in the red box includes a CPU integrated with an electric field sensor. b Non-destructive diagnosis of a resistor divider network with an electrical potential sensor array¹⁵⁴. c ECG diagnosis using an electrical potential probe. Electric field detection with MEMS can be applied to detect bioelectric signals to compactly diagnose human health¹⁵⁶. d Hand tracking of mobile electronic devices using the built-in electric field sensor array¹⁵⁸. e Schematic of wearable electro clothing system¹⁶¹. f Illustration of an implantable ECG loop recorder¹⁶⁴