Fig. 2: Block diagrams for control schemes of electrostatic resonance MEMS sensors. | Microsystems & Nanoengineering

Fig. 2: Block diagrams for control schemes of electrostatic resonance MEMS sensors.

From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review

Fig. 2

a In an open-loop system the user modulates the input with no feedback. b The self-oscillation system, one of a closed-loop scheme, uses feedback control to satisfy the Barkhausen condition. c The PLL is a closed-loop system that measures phase error and adjusts the drive frequency to keep quadrature

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