Fig. 3: Schematic diagram of the magnetic field sensing mechanism based on electrostatic actuation and electromagnetic induction.
From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review
a For in-plane driving, the out-of-plane magnetic field passes through the area enclosed by the coil, which changes due to the lateral motion of the structure. b For torsional driving, the in-plane magnetic field passes through the coil area, which changes as the structure rotates. In both cases, the effective magnetic flux through the coil varies with time, generating an electromotive force via electromagnetic induction
