Table 1 Main characteristics of MEMS magnetic field sensors based on electrostatic driving and electromagnetic induction sensing
From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review
Year | Resonator type | Sensing direction | Resonator size (μm3) | Resonant frequency | Quality factor | Packaging condition | Sensitivity without gain | Sensitivity with gain | Resolution (μT) | Nonlinearity error (%) | Actuation voltage |
|---|---|---|---|---|---|---|---|---|---|---|---|
2013 | Square extensional89 | Out-of-plane | 1000 × 1000 × 46 | 4.329 MHz | 3700 | Unsealed | – | 3 μV/mT | – | – | DC 50 V / AC 1 V |
2014 | Double-ended tuning fork91 | Out-of-plane | 460 × 10 × 10 | 173.02 kHz | 13840 | Unsealed | – | 17.7 μV/mT | – | – | DC 5 V / RF power -15 dBm |
2016 | Dual square extensional90 | Out-of-plane | 1000 × 1000 × 45 × 2 (Dual) | 4.319 MHz | 42000 | Vacuum | – | 47.7 μV/mT | – | 1.19 | DC 40 V / AC 1 V |
2019 | Contractive- extensional88 | Out-of-plane | 4000 × 4000 × 51 | 37.63 kHz | 517 | Unsealed | – | 1306 mV/mT | 2.57 | 0.08 | DC 25 V / AC 1.5 V |
2019 | Torsional plate92 | In-plane | 2000 × 2000 × 50 | 42.404 kHz | 5.3 | Unsealed | – | 100 mV/mT | 25 | 0.3 | DC 25 V / AC 1.5 V |
2020 | Torsional frame93 | In-plane | 3000 × 2500 × 50 | 12.042 kHz | 430 | Unsealed | 1.9 μV/mT | 491 mV/mT | 6 | 0.4 | DC 25 V / AC 1.5 V |
2025 | Eccentric resonator95 | In-plane (X/Y) | 1000 × 1000 × 50 | X: 5.01 kHz | 46.8 | Unsealed | X: 21.91 μV/mT | – | 340 | 0.97 | AC 160 V |
Y: 13.53 kHz | 1381 | Unsealed | Y: 57.92 μV/mT | – | 100 | 0.71 | AC 160 V |
