Table 2 Comparison of electrostatic induction-type MEMS electric field sensors that are electrostatically driven
From: Electrostatically actuated MEMS resonators for magnetic and electric field sensing: a review
Year | MEMS electric field sensor characteristics | Sensing axis | Resonator size (μm3) | Resonant frequency | Quality factor | Packaging condition | Sensitivity (mV/(kV/m)) | Resolution (V/m) | Nonlinearity error (%) | Actuation voltage | Sensing range (kV/m) |
|---|---|---|---|---|---|---|---|---|---|---|---|
2001 | Vertical design with aperture124 | 1D | 120 × 80 × 2 | 7.6 kHz | – | Unsealed | 0.035 | – | – | DC 60 V/AC – | 500 |
2006 | Vertical design with slit126 | 1D | 400 × 560 × 2 | 4.13 kHz | 10 | Unsealed | 18.3 | 200 | 1.8 | DC 20 V/AC 0.3 V | 10 |
2010 | Lateral design130 | 1D | – | 1.862 kHz | 31034 | Vacuum | 0.09 | 50 | 2.1 | DC 0.25 V/AC 0.02 V | 50 |
2013 | Coplanar-lateral design135 | 1D | 2700 × 2200 × 25 | 3.042 kHz | – | Unsealed | 0.2 | 40 | 1 | DC 20 V/AC 1 V | 50 |
2018 | Bottom-actuated torsional136 | 1D | 1900 × 2000 × 10 | 5.190 kHz | 10.81 | Unsealed | 4.82 | – | 0.15 | – | 50 |
2025 | Comb-actuated torsional138 | 1D | 2000 × 800 × 50 | 7.43 kHz | – | Unsealed | 3.219 | 1667 | 0.7 | AC 160 V | 250 |
2015 | 2D detection with single driving139 | 2D | 3500 × 3500 × 25 | 799 Hz | 27 | Unsealed | X: 0.675, Y: 0.689 | – | 1.41 | DC 40 V/AC 1 V | 25 |
2017 | 3D detection with single driving140 | 3D | 7000 × 7000 × 20 | 1.291 kHz | – | Unsealed | X: 0.136, Y: 0.121 Z: 0.101 | – | 5.5 | DC 80 V/AC 3.5 V | 50 |
2018 | 3D detection with 3 assembled sensors145 | 1D | 2600 × 2000 × 25 for X, Y and Z | X: 2.22 kHz, Y: 2.22 kHz, Z: 2.25 kHz | – | Unsealed | X: 0.457, Y: 0.420, Z: 0.331 | – | 1.8 | DC 20 V/AC 1 V | 120 |
2019 | 3D detection with 3 assembled sensors146 | 1D | 2600 × 2000 × 25 for X, Y and Z | X: 2.27 kHz, Y: 2.25 kHz, Z: 2.21 kHz | – | Unsealed | X: 0.330, Y: 0.342, Z: 1.479 | – | 4.3 | DC 20 V/AC 1 V | 120 |
2022 | Mode localization149 | 1D | (2.57 × 106) × 30 | 24 kHz | 25000 | Vacuum | 0.76/kV/m | 22.9 | 0.16 | DC 5 V/AC 5 mV | 7 |
