Fig. 3: Design optimization of the microcantilever-based resonator under lateral modes. | Microsystems & Nanoengineering

Fig. 3: Design optimization of the microcantilever-based resonator under lateral modes.

From: Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids

Fig. 3: Design optimization of the microcantilever-based resonator under lateral modes.The alternative text for this image may have been generated using AI.

a Variation of the resonant frequency with the plate stem dimensions, in which the length ranges from 200 to 500 μm and the width ranges from 150 to 500 μm. b Quality factor as a function of resonant frequency and dynamic viscosity of liquid, for the rectangular-plate microcantilever. c Linear relationship between the quality factor and liquid viscosity for the rectangular-plate microcantilever. d Quality factor versus resonant frequency and square root of the liquid viscosity for trapezoidal-plate microcantilever with b1c = 1300 μm/1800 μm and b1f ranging from 500 to 1250 μm/1700 μm. e Dependence of the linear correlation coefficient (Quality factor-1/√μf) on free side width (b1f) of the trapezoidal-plate structure for the microcantilever

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