Fig. 4: Schematic fabrication process of the resonator chip. | Microsystems & Nanoengineering

Fig. 4: Schematic fabrication process of the resonator chip.

From: Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids

Fig. 4: Schematic fabrication process of the resonator chip.The alternative text for this image may have been generated using AI.

a Thermal oxidization. b Mo film deposition. c AlN film deposition. d Metal layer sputtering. e LPCVD SiO2 layer deposition. f Bonding pad exposure. g Bottom electrode exposure. h Bonding pad formation of the bottom electrode. i Microcantilever-based resonator release. j Fabricated piezoelectric resonator chip, including SEM image and detailed LSCM image. k Experimental platform of the resonator chip for liquid sensing

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