Table 2 Compromised dimensional parameter of the microcantilevered plate resonator

From: Piezoelectric stepped-plate resonators vibrating at lateral modes for direct viscosity determination in liquids

Parameter

Value (μm)

Parameter

Value (μm)

L1

1050

b2

250

b1c

1750

L3

130

b1f

1350

b3

22

L2

320

h

25