Table 1 Parameters of dual-mass gyroscope system

Drive modal resonant frequency

f_x

11304.5

Hz

Drive modal quality factor

Q_x

252753

-

Drive modal displacement to

capacitor coefficient

k_xc

0.083

pF/um

Drive modal vibration amplitude

A_x

3

um

Sense modal resonant frequency

f_y

11443.7

Hz

Sense modal quality factor

Q_y

263884

-

Sense modal displacement to

capacitor coefficient

k_yc

0.115

pF/um

Capacitor to voltage coefficient

k_cv

7.05

V/pF

Coriolis mass

m

6.7×10⁻⁷

kg

Voltage to force coefficient

k_vf

0.499

N/V

Stiffness coupling coefficient

k_xy

0.0561

N/m

Voltage to stiffness coefficient

k_vs

0.0097

N/m/V