Table 2 φxe1 and φxe2 under different temperature conditions

From: Phase error analysis for MEMS gyroscopes operational modes based on force-to-rebalance rate measurement mode

Ambient temperature

φxe1

Unit

φxe2

Unit

−20°C

−5.04

degree

−2.37

degree

Room temperature

−3.76

−1.25

50 °C

−2.88

−0.61