Table 4 φye1 and φye2 under different temperature conditions

From: Phase error analysis for MEMS gyroscopes operational modes based on force-to-rebalance rate measurement mode

Ambient temperature

φye1

Unit

φye2

Unit

−20 °C

−10.02

degree

−2.56

degree

Room temperature

−8.88

−1.57

50 °C

−7.99

−0.95