Fig. 2: FEM simulation results validating the electrical and mechanical characteristics of the proposed flexible capacitive pressure sensor.

a Schematic representation of the proximity simulation. A grounded conductor starts approaching the sensor surface from 1 meter away until it makes contact. b Results of the proximity simulation based on the gap between the electrodes. c Cross-sectional views of the electric field when sensors with 100 µm and 900 nm gaps are in contact with a grounded conductor. d Crosstalk test results of a 4 × 4 pressure sensor array with a 100 µm gap. e Crosstalk test results of a 4 × 4 pressure sensor array with a 900 nm gap. f Stress distribution of a pressure sensor with a 10 µm gap when bent to a ROC = 1 mm. g Stress distribution of a pressure sensor with a 900 nm gap when bent to a ROC = 1 mm. h Variation in base capacitance based on the gap between the electrodes when bent to a ROC = 1 mm with the same bending radius.