Fig. 4: Measurement results of the fabricated unit flexible capacitive pressure sensor. All measurements were extracted from the sensor with a 900 nm gap. | Nature Communications

Fig. 4: Measurement results of the fabricated unit flexible capacitive pressure sensor. All measurements were extracted from the sensor with a 900 nm gap.

From: Interference-free nanogap pressure sensor array with high spatial resolution for wireless human-machine interfaces applications

Fig. 4: Measurement results of the fabricated unit flexible capacitive pressure sensor. All measurements were extracted from the sensor with a 900 nm gap.

a Dynamic pressure measurement results of the fabricated sensor in the range of 50 ~ 150 kPa. b Hysteresis measurement results in the range of 0 ~ 330 kPa. c Durability test results of 100 kPa pressure applied for 100,000 cycles. d Schematic of the proximity test setup for evaluating stability against external interference. A conductor tip, initially 80 mm away from the sensor, approaches until it reaches a distance of 1 mm from the sensor, pauses for 1 second, then returns to its original position. e Proximity test results of sensors with gaps of 900 nm and 100 µm, respectively. f Measurement results when applying pressure up to 330 kPa using insulator and conductor tips on sensors with a 900 nm gap. g Image of the fabricated 4 × 4 pressure sensor array for crosstalk experiments. h Crosstalk experiment results of the 4 × 4 pressure sensor array. (i) Bending stability test results according to electrode gap. The error bars represent the standard deviations.

Back to article page