Fig. 2: Structure design of M-SRuM inductors and capacitors and corresponding equivalent lumped circuit model. | Nature Communications

Fig. 2: Structure design of M-SRuM inductors and capacitors and corresponding equivalent lumped circuit model.

From: Wafer-scale platform for on-chip 3D radio frequency lumped passive components using metal self-rolled-up membrane technique

Fig. 2

a Structural parameter of the M-SRuM inductor. b Schematic of the parasitic parameters of the M-SRuM inductors. c Optical image of the M-SRuM inductors. d The equivalent circuit model of the M-SRuM inductors. e Structural dimension parameters of the planar capacitors. f Schematic of the parasitic parameters of the M-SRuM capacitors. g The equivalent circuit of the M-SRuM capacitors.

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