Table 1 Structural parameters of the M-SRuM inductors and capacitors
Symbol | Description |
|---|---|
\({{{{\boldsymbol{l}}}}}_{{{{\boldsymbol{s}}}}}\) | length of the strip |
\({{{{\boldsymbol{l}}}}}_{{{{\boldsymbol{c}}}}}\) | length of the connecting line |
\({{{{\boldsymbol{w}}}}}_{{{{\boldsymbol{s}}}}}\) | width of the strip |
\({{{{\boldsymbol{t}}}}}_{{{{\boldsymbol{c}}}}}\) | the thickness of the copper layer |
\({{{{\boldsymbol{t}}}}}_{{{{\boldsymbol{alo}}}}}\) | the thickness of aluminum oxide layer |
\({{{\boldsymbol{N}}}}\) | number of turns |
\({{{\boldsymbol{D}}}}\) | the outer diameter |
\({{{{\boldsymbol{l}}}}}_{{{{\boldsymbol{if}}}}}\) | the length of the interdigital fingers |
\({{{{\boldsymbol{w}}}}}_{{{{\boldsymbol{e}}}}}\) | the width of the electrode |
\({{{{\boldsymbol{w}}}}}_{{{{\boldsymbol{if}}}}}\) | the width of interdigital fingers |
\({{{{\boldsymbol{w}}}}}_{{{{\boldsymbol{gf}}}}}\) | the gap between interdigital fingers |
\({{{{\boldsymbol{w}}}}}_{{{{\boldsymbol{gfe}}}}}\) | the gap between the interdigital finger and electrode |
