Fig. 5: Expansion of antiphase boundaries in the HZO film. | Nature Communications

Fig. 5: Expansion of antiphase boundaries in the HZO film.

From: A stable monoclinic variant and resultant robust ferroelectricity in single-crystalline hafnia-based films

Fig. 5

a–e Cross-sectional atomic-resolved iDPC-STEM images showing the intergrowth of the polar variant with the m-HZO phase. The polar variants feature lamella with thickness of 2 u.c., 3 u.c., 4 u.c., 5 u.c. and 8 u.c., respectively. f–j The RX maps corresponding to (a–e). k, l Enlarged HAADF-STEM and iDPC-STEM images of the 3 u.c. antiphase boundary, giving the detailed distribution of Hf/Zr- and O- atomic columns. m, n Enlarged iDPC-STEM image of the FE-HZO phase (black rectangle in (e)) and corresponding reversed O-displacement vector map, suggesting the ferroelectric displacements in FE-HZO.

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