Fig. 3: Growth of perovskite BaSnO3 and SrSnO3 thin films on patterned (001) SrTiO3 substrates.
From: Defect engineering in BaSnO3 and SrSnO3 thin films through nanoscale substrate patterning
a Schematic illustrating hybrid MBE growth of thin films of BaSnO3 and SrSnO3 on the patterned and recrystallized SrTiO3 substrates. b 2θ–ω XRD scans for BaSnO3 (left) and SrSnO3 (right) films grown on patterned (001) SrTiO3 substrates. The film thicknesses are indicated. c A model of BaSnO3 film growth on patterned SrTiO3 substrate with epitaxial atomic arrangements at the interface between film and substrate. d SEM images from a 75 nm-thick BaSnO3 film from the top surface (dark regions are voids in the film). Scale bars are 1 µm and 100 nm. e Low- and high-magnification HAADF-STEM images from BaSnO3 film in cross-section showing epitaxial growth and uniformity. Scale bars are 50 nm and 2 nm. f A model depicting SrSnO3 film growth on patterned SrTiO3 substrate with epitaxial atomic arrangements at the interface between SrSnO3 and SrTiO3. g SEM images from a 15 nm-thick SrSnO3 film from the top surface showing uniformity of the film. Scale bars are 1 µm and 100 nm. h Low- and high-magnification HAADF-STEM images from SrSnO3 film in cross-section showing epitaxial growth, uniform 15 nm film thickness, and excellent film quality. Scale bars are 10 nm and 2 nm.
