Fig. 1: Schematic of AlScN capacitor and its electrical characteristics.
From: Write cycling endurance exceeding 1010 in sub-50 nm ferroelectric AlScN
a Schematic illustration of the Al0.64Sc0.36N ferroelectric capacitor with a via-contact structure. b, c Optical microscope images of the ferroelectric capacitor. The number on the image indicates the radius of the top electrode. Most of the image in c was acquired under top illumination, while a small region on the right was imaged under bottom illumination. d J–V hysteresis loops, e ferroelectric polarization response to applied voltage pulses, and f maximum endurance cycles vs. conventional 2Pr for various diameters (10, 20, and 40 μm).
