Abstract
Colloidal quantum dots (QDs) are leading candidates for next-generation optoelectronics owing to their tuneable bandgaps, narrow emission linewidths, and high luminescence quantum yields. For virtual-, augmented-, and mixed-reality display applications of these materials, patterning full-color QDs at μm-length scales is essential. However, existing photolithographic approaches often degrade QD luminance characteristics by exposing them to harsh processing conditions, or they compromise the structural fidelity of the resulting patterns. Here we report a photoresist-guided indirect (PIN) photopatterning strategy that includes (i) lithographic formation of sacrificial PR patterns, (ii) deposition of a crosslinked QD film on top, and (iii) PR stripping that removes the sacrificial PR, leaving behind crosslinked QD patterns on the substrate. QD crosslinking is mediated by a diazo-based ligand thermocrosslinker, Diazo-4-LiXer. Leveraging low-temperature (110–120 °C)-activated carbene chemistry, Diazo-4-LiXer bridges neighbouring QDs while maintaining their intrinsic photoluminescence and electroluminescence through repeated processing. Moreover, Diazo-4-LiXer enables thermocrosslinking without affecting the underlying photoresist pre-patterns, which serve as structural templates determining the thickness and fidelity of the QD patterns. Using PIN photopatterning, we realize high-fidelity RGB patterns exceeding 4,000 pixels per inch resolution and demonstrate integration-level scalability by fabricating a 10 × 10 passive-matrix full-colour RGB QD–LED array.
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The data that support the findings of this study are available from the corresponding authors upon request. Source data are provided with this paper.
References
Hsiang, E.-L. et al. AR/VR light engines: perspectives and challenges. Adv. Opt. Photonics 14, 783–861 (2022).
Chen, Z., Yan, S. & Danesh, C. MicroLED technologies and applications: characteristics, fabrication, progress, and challenges. J. Phys. D Appl. Phys. 54, 123001 (2021).
Park, S. Y., Lee, S., Yang, J. & Kang, M. S. Patterning quantum dots via photolithography: a review. Adv. Mater. 35, 2300546 (2023).
Wu, M.-C., Chung, M.-C. & Wu, C.-Y. 3200 ppi matrix-addressable blue MicroLED display. Micromachines 13, 1350 (2022).
García de Arquer, F. P. et al. Semiconductor quantum dots: technological progress and future challenges. Science 373, eaaz8541 (2021).
Kagan, C. R., Lifshitz, E., Sargent, E. H. & Talapin, D. V. Building devices from colloidal quantum dots. Science 353, aac5523 (2016).
Pietryga, J. M. et al. Spectroscopic and device aspects of nanocrystal quantum dots. Chem. Rev. 116, 10513–10622 (2016).
Lim, J. et al. Perspective on synthesis, device structures, and printing processes for quantum dot displays. Opt. Mater. Express 2, 594–628 (2012).
Cho, K.-S. et al. High-performance crosslinked colloidal quantum-dot light-emitting diodes. Nat. Photonics 3, 341–345 (2009).
Dai, X., Deng, Y., Peng, X. & Jin, Y. Quantum-dot light-emitting diodes for large-area displays: towards the dawn of commercialization. Adv. Mater. 29, 1607022 (2017).
Zhukov, A. E., Kryzhanovskaya, N. V., Moiseev, E. I. & Maximov, M. V. Quantum-dot microlasers based on whispering gallery mode resonators. Light Sci. Appl. 10, 80 (2021).
Park, Y.-S., Roh, J., Diroll, B. T., Schaller, R. D. & Klimov, V. I. Colloidal quantum dot lasers. Nat. Rev. Mater. 6, 382–401 (2021).
Alivisatos, A. P. Semiconductor clusters, nanocrystals, and quantum dots. Science 271, 933–937 (1996).
Empedocles, S. A., Norris, D. J. & Bawendi, M. G. Photoluminescence spectroscopy of single CdSe nanocrystallite quantum dots. Phys. Rev. Lett. 77, 3873–3876 (1996).
Jeong, B. G. et al. Colloidal spherical quantum wells with near-unity photoluminescence quantum yield and suppressed blinking. ACS Nano 10, 9297–9305 (2016).
Ekimov, A. I., Efros, A. L. & Onushchenko, A. A. Quantum size effect in semiconductor microcrystals. Solid State Commun. 56, 921–924 (1985).
Chen, O. et al. Compact high-quality CdSe–CdS core–shell nanocrystals with narrow emission linewidths and suppressed blinking. Nat. Mater. 12, 445–451 (2013).
Kim, T.-H. et al. Full-colour quantum dot displays fabricated by transfer printing. Nat. Photonics 5, 176–182 (2011).
Kim, B. H. et al. Multilayer transfer printing for pixelated, multicolor quantum dot light-emitting diodes. ACS Nano 10, 4920–4925 (2016).
Yang, P., Zhang, L., Kang, D. J., Strahl, R. & Kraus, T. High-resolution inkjet printing of quantum dot light-emitting microdiode arrays. Adv. Opt. Mater. 8, 1901429 (2020).
Liu, Y. et al. Efficient all-solution processed quantum dot light emitting diodes based on inkjet printing technique. ACS Appl. Mater. Interfaces 9, 25506–25512 (2017).
Ali, A., Oh, S., Kim, W. & Oh, S. J. Advances in colloidal quantum dot-based displays for QLEDs and patterning applications. Korean J. Chem. Eng. 41, 3545–3560 (2024).
Kim, Y., Yang, J. & Choi, M. K. Recent advances in transfer printing of colloidal quantum dots for high-resolution full color displays. Korean J. Chem. Eng. 41, 3469–3482 (2024).
Fu, Z. et al. Direct photo-patterning of efficient and stable quantum dot light-emitting diodes via light-triggered, carbocation-enabled ligand stripping. Nano Lett. 23, 2000–2008 (2023).
Hu, C. et al. The micropatterning of layers of colloidal quantum dots with inorganic ligands using selective wet etching. Nanotechnology 25, 175302 (2014).
Kim, G.-H. et al. High-resolution colloidal quantum dot film photolithography via atomic layer deposition of ZnO. ACS Appl. Mater. Interfaces 13, 43075–43084 (2021).
Shulga, A. G. et al. Patterned quantum dot photosensitive FETs for medium frequency optoelectronics. Adv. Mater. Technol. 4, 1900054 (2019).
Lee, J. Y. et al. Nondestructive direct photolithography for patterning quantum dot films by atomic layer deposition of ZnO. Adv. Mater. Interfaces 9, 2200835 (2022).
Hahm, D. et al. Direct patterning of colloidal quantum dots with adaptable dual-ligand surface. Nat. Nanotechnol. 17, 952–958 (2022).
Yang, J. et al. Nondestructive photopatterning of heavy-metal-free quantum dots. Adv. Mater. 34, 2205504 (2022).
Liu, D. et al. Direct optical patterning of perovskite nanocrystals with ligand cross-linkers. Sci. Adv. 8, eabm8433 (2022).
Wang, Y., Fedin, I., Zhang, H. & Talapin, D. V. Direct optical lithography of functional inorganic nanomaterials. Science 357, 385–388 (2017).
Cho, H. et al. Direct optical patterning of quantum dot light-emitting diodes via in situ ligand exchange. Adv. Mater. 32, 2003805 (2020).
Yang, J. et al. High-resolution patterning of colloidal quantum dots via non-destructive, light-driven ligand crosslinking. Nat. Commun. 11, 2874 (2020).
Maeng, S. et al. Direct photocatalytic patterning of colloidal emissive nanomaterials. Sci. Adv. 9, eadi6950 (2023).
Lee, J. et al. Direct optical lithography of colloidal InP-based quantum dots with ligand pair treatment. ACS Energy Lett. 8, 4210–4217 (2023).
Liu, D. et al. Nondestructive direct optical patterning of perovskite nanocrystals with carbene-based ligand cross-linkers. ACS Nano 18, 6896–6907 (2024).
Qie, Y. et al. Ligand-nondestructive direct photolithography assisted by semiconductor polymer cross-linking for high-resolution quantum dot light-emitting diodes. Nano Lett. 24, 1254–1260 (2024).
Yi, Y.-Q.-Q. et al. Nondestructive direct patterning of both hole transport and emissive layers for pixelated quantum-dot light-emitting diodes. ACS Nano 18, 15915–15924 (2024).
Lee, J. et al. Photocleavable ligand-induced direct photolithography of InP-based quantum dots. ACS Energy Lett. 10, 94–101 (2025).
Nie, Q. et al. Direct optical patterning of quantum dot light-emitting diodes based on ultrafast, low-energy, site-controlled click chemistry reaction. Adv. Funct. Mater. 35, 2420829 (2025).
Seo, H. et al. Direct photolithography of colloidal InP-based quantum dots utilizing the photoligation method. Chem. Mater. 37, 1424–1431 (2025).
Xiao, P. et al. Ligand-engineered direct optical lithography of nanocrystals with industrially compatible solvents. ACS Nano 19, 14509–14520 (2025).
Park, J.-S. et al. Alternative patterning process for realization of large-area, full-color, active quantum dot display. Nano Lett. 16, 6946–6953 (2016).
Lin, C. H. et al. Large-area lasing and multicolor perovskite quantum dot patterns. Adv. Opt. Mater. 6, 1800474 (2018).
Mei, W. et al. High-resolution, full-color quantum dot light-emitting diode display fabricated via photolithography approach. Nano Res. 13, 2485–2491 (2020).
Ji, T., Jin, S., Zhang, H., Chen, S. & Sun, X. W. Full color quantum dot light-emitting diodes patterned by photolithography technology. J. Soc. Inf. Disp. 26, 121–127 (2018).
Yi, Y.-Q.-Q. et al. Molecular design of diazo compound for carbene-mediated cross-linking of hole-transport polymer in QLED with reduced energy barrier and improved charge balance. ACS Appl. Mater. Interfaces 14, 39149–39158 (2022).
Yang, S. et al. Carbene-mediated polymer cross-linking with diazo compounds by C–H activation and insertion. Macromolecules 55, 3423–3429 (2022).
Kost, J., Bleiziffer, A., Rusitov, D. & Rühe, J. Thermally induced cross-linking of polymers via C,H insertion cross-linking (CHic) under mild conditions. J. Am. Chem. Soc. 143, 10108–10119 (2021).
Luo, C. et al. Review of recent advances in inorganic photoresists. RSC Adv. 10, 8385–8395 (2020).
Lu, S. et al. Beyond a linker: the role of photochemistry of crosslinkers in the direct optical patterning of colloidal nanocrystals. Angew. Chem. Int. Ed. 61, e202202633 (2022).
Kim, M. J. et al. Universal three-dimensional crosslinker for all-photopatterned electronics. Nat. Commun. 11, 1520 (2020).
Levinson, H. J. Principles of Lithography (SPIE, 2010).
Park, S. Y. et al. Network of inorganic nanocrystals can swell: study of swelling-induced surface instability. Small 20, 2306366 (2024).
Lepage, M. L. et al. A broadly applicable cross-linker for aliphatic polymers containing C–H bonds. Science 366, 875–878 (2019).
Chang, J. H. et al. Pushing the band gap envelope of quasi-type II heterostructured nanocrystals to blue: ZnSe/ZnSe1-XTeX/ZnSe spherical quantum wells. Energy Mater. Adv. 2021, 3245731 (2021).
Acknowledgements
This work was supported by the Samsung Research Funding & Incubation Center of Samsung Electronics under project number SRFC-MA1901-51. This work was also supported by the National Research Foundation of Korea (NRF) grants funded by the Ministry of Science, ICT, and Future Planning (2021R1A2C2008332 and RS-2024-00445116).
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B.K., M.S.K., and C.K. conceptualized and supervised the project. H.H. and M.L. synthesized and characterized the crosslinker and organic molecules. H.K., C.H.L., S.R., J.K., S.Y.P., S.J.L., H.B., S.L., H.J., and Y.H.J. characterized crosslinked QD films and conducted the PIN photopatterning. J.S.P., H.J.L., J.W.P., J.S., W.K.B., and C.K. fabricated the electrical devices. H.K., H.H., and C.H.L. wrote the manuscript, and all authors reviewed the manuscript.
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Kim, H., Ham, H., Lim, C.H. et al. Photoresist-guided indirect photopatterning of quantum dots via carbene-mediated ligand thermocrosslinking. Nat Commun (2026). https://doi.org/10.1038/s41467-026-70770-z
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DOI: https://doi.org/10.1038/s41467-026-70770-z


